| 摘要 |
A thin film actuated mirror for an actuated mirror array includes a pedestal, a piezoelectric structure mounted to the pedestal, and a mirror surface interconnected to the piezoelectric structure such that the mirror surface tilts in response to the deformation of the piezoelectric material layer. The pedestal includes a first pedestal section and a second pedestal section, and the piezoelectric structure is divided into a first portion and a second portion. The piezoelectric structure includes a piezoelectric material layer having two opposing surfaces, and two metal electrodes, the electrodes being mounted on opposing surfaces of the piezoelectric material. The piezoelectric structure first portion is mounted to the first pedestal section at a proximal end of the piezoelectric structure and the second portion is mounted to the second pedestal section at a distal end of the piezoelectric structure. |
