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发明名称
Method of making electrical contacts to gate structures in integrated circuits
摘要
申请公布号
EP0465056(B1)
申请公布日期
1996.11.06
申请号
EP19910305597
申请日期
1991.06.20
申请人
AT&T CORP.
发明人
CHEN, MIN-LIANG
分类号
H01L29/78;H01L21/28;H01L21/336;H01L21/60;H01L21/768;(IPC1-7):H01L21/311
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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