| 摘要 |
PURPOSE: To prevent dropping of a foreign matter on a mask or the like by softening or melting the surface of a pellicle film before the pellicle is adhered to a mask or a reticle so that the foreign matter on the film is molten and fixed to the film. CONSTITUTION: Before a pellicle film is adhered to a mask or a reticle, the surface of the pellicle film is softened or molten by heating so as to melt and fix a foreign matter present on the pellicle film to the film. Namely, an IR lamp is used to irradiate the surface of the pellicle film with IR rays and to heat the film to 100-150 deg.C when a cellulose pellicle film is used and to 108-120 deg.C when an amorphous fluoropolymer pellicle film is used. Once the pellicle film is softened or molten by heating, the foreign matter depositing on the surface is molten and fixed to the pellicle film and physically bonded to the film. Therefore, the foreign matter hardly drops from the pellicle film. |
