| 摘要 |
PURPOSE: To obtain a field-effect three-terminal thin film element, which has a large field effect, is superior in modulation characteristics and is provided with a superconducting channel, by a method wherein the superconductive transition temperature of the channel is made higher than the Kosterlitz-Thouless transition temperature of the channel. CONSTITUTION: A region covered with a dielectric film 5 on a superconducting thin film 2 plays the role of a superconducting channel. Speaking on material, the respective materials for a substrate 1, the thin film 2, source and drain electrodes 3 and 4, the film 5 and a gate electrode 6 are an STO film, a YBCO film, a gold film, an STO film and a platinum film. The thin film 2 is formed 100Åthick. The thin film 2 is formed in such a way as to perform a C-axis orientation on the substrate 1. Accordingly, a channel current is made to flow in parallel to a superconducting plane consisting of a CuO film of the YBCO film. In particular, by making higher the superconductive transition temperature of the channel than the Kosterlitz-Thouless transition temperature of the channel, a field-effect three-terminal thin film element, which has a large field effect and is superior in modulation characteristics, can be obtained.
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