| 摘要 |
PURPOSE: To provide an ozonizer designed to prevent a grounding electrode from wear due to electric discharge by providing the surface of the void side of the electrode with an inorganic dielectric material layer through film formation. CONSTITUTION: First, a grounding electrode made of SUS material is provided with an inorganic dielectric material layer <=50μm thick of a metal oxide such as Al2 O3 or ZrO2 through film formation technique selected from vacuum vapor deposition, sputtering, PVD and CVD. Secondly, the inner wall surface of a dielectric tube 14 such as a glass cylinder with one end closed and the other end open is provided with a high-voltage electrode 1, and the inner surface of the concentrically circular tube around the dielectric tube 14 via a gap 3 is provided with a grounding electrode 12 consisting of an inorganic dielectric material layer 15 made by film formation technique, and the high-voltage electrode 1 and the grounding electrode 12 are mutually connected via a high-voltage source 5 to constitute this ozonizer. Air or oxygen as a feedstock gas is introduced into this ozonizer and a specified level of voltage is applied between both the electrodes 1 and 12 to generate a silent discharge and to generate ozone.
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