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发明名称
CLEANING DEVICE
摘要
申请公布号
JPH08290134(A)
申请公布日期
1996.11.05
申请号
JP19950117883
申请日期
1995.04.19
申请人
KAIJO CORP
发明人
SHIMIZU MASAYUKI;YAMAMOTO TOSHIAKI
分类号
B08B3/10;H01L21/304;(IPC1-7):B08B3/10
主分类号
B08B3/10
代理机构
代理人
主权项
地址
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