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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH08293599(A)
申请公布日期
1996.11.05
申请号
JP19950101047
申请日期
1995.04.25
申请人
MITSUBISHI ELECTRIC CORP
发明人
OGAWA IKUO
分类号
H01L21/336;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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NEUERTIGE LAUFPUPPA.
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TRANSPORTABLES ABSAUG- UND FILTERGERAET