| 摘要 |
PURPOSE: To provide an apparatus and a method for outputting an inspection execution data whereby the inspection execution data can be changed easily. CONSTITUTION: Inspection part data for every type of substrates having positional data and kind data of parts are stored in a first memory part 2, and inspection content data for every kind of parts are stored in a second memory part 3 beforehand. In accordance with an inspection execution data output instruction from a substrate inspection apparatus 10, inspection part data of the type of substrates designated by the instruction are read out by an inspection execution data formation part 4 from the first memory part 2, and inspection content data corresponding to the part kind data in the read-out inspection part data are read out from the second memory part 3. The part kind data are replaced with the inspection content data, thereby to form inspection execution data having positional data and inspection content data of parts of the designated type of substrates. The formed data are output from a data input/output part 7 to the substrate inspection apparatus 10. |
