| 摘要 |
PURPOSE: To easily reduce in size a sensor element while excellent sensor characteristics are being maintained by sequentially laminating a pair of first electrodes, a filmlike gas sensitive material and a pair of a pair of second electrodes on a heat resistant insulating board. CONSTITUTION: A pair of overall electrodes 2 each having a thickness of about 300nm are screen printed on an alumina board 1 having, for example, a thickness of about 0.3mm. The electrodes are coated with solution in which indium ethyl hexanoate and p-toluic tin (metal oxide semiconductor) are prepared as main bodies, thermally decomposed to form a gas sensitive material 3 having a thickness of about 100nm, and further the pair of the electrodes 4 each having a thickness of about 2μm are screen printed at the upper positions of the electrodes 2 via the material 3. According to this forming method, since the electrodes 2, 4 are merely laminated, the manufacture is easy. Since the electrodes 2 are not necessarily increased in thickness, no step is formed, the structural uniformity of the material 3 can be easily controlled, a space for forming electrodes pads for connecting leads is eliminated on a board 1, and the element can be reduced in size.
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