发明名称 |
Mirror unit and an exposure apparatus using the unit |
摘要 |
A mirror unit includes a mirror having a reflecting surface, a holding member for supporting the mirror and an airtight chamber incorporating the mirror, supported by the holding member, in an airtight state. Either the mirror or the holding member constitutes a portion of a side wall of the airtight chamber. The mirror unit can be suitably used in an exposure apparatus which uses a synchrotron radiation light source or the like as a light source.
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申请公布号 |
US5572563(A) |
申请公布日期 |
1996.11.05 |
申请号 |
US19940357650 |
申请日期 |
1994.12.16 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KASUMI, KAZUYUKI;WATANABE, YUTAKA |
分类号 |
G02B5/08;G03F7/20;G21K1/06;G21K5/00;G21K5/02;H01L21/027;(IPC1-7):G21K5/00 |
主分类号 |
G02B5/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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