| 摘要 |
<p>PURPOSE: To provide a positioning device which is improved in the positioning control characteristics of its movable parts. CONSTITUTION: The positioning device, equipped with fixed parts 2 and 4, the movable parts 5 and 6 fitted movably to the fixed parts 2 and 4, position measuring means 8 and 9 which are fixed to the fixation parts 2 and 4 and measure the positions of the movable parts 5 and 6, an acceleration measuring means 10 which measures the acceleration of the fixed parts 2 and 4, and a positioning control means 2 which feeds the measured values of the position measuring means 8 and 9 and acceleration measuring means 10 back to move the movable parts 5 and 6 at their target positions, is provided with the position measuring means 8 and 9 and acceleration measuring means 10 at the position 16 on the fixed part where the position and acceleration variations of the fixed parts 2 and 4 by the acceleration of the movable parts 5 and 6 are in phase with each other.</p> |
