摘要 |
PURPOSE: To provide an impedance matching in a high-frequency circuit device using an oxide superconductor by a method wherein the high-frequency circuit device is provided with a constitution which comprises a high-frequency transmission line, a superconducting element, which consists of an oxide superconductor, and an impedance matching circuit, which has the jointed structure of an oxide superconductor with a metallic material or an oxide. CONSTITUTION: A coplanar transmission line 2 and a ground plane 4 are both constituted of an oxide superconductor than film, a Josephson element 3 is formed on one part of the line 2 and an electrode on one side of electrodes on the element 3 is grounded. An oxide thin film is inserted between the element 3 and the line 2 and an impedance matching part is constituted. In an equivalent electric circuit (b), the element 3 corresponds to a superconducting element 20, the line 2 corresponds to a transmission line 21 and the impedance matching part corresponds to a resistor 22. |