| 摘要 |
<p>PROBLEM TO BE SOLVED: To evenly emit electrons by selectively etching a titanium-based adhesive layer make tips to spring up tip, based on the internal stress of tungsten itself. SOLUTION: After a titanium adhesive layer 12 is formed on a substrate 11 and a cathode 12 is formed, an Al layer is formed and etched to form a mask 14' for forming multiple- micro-tips and the tungsten cathode 13 is radially etched using the mask 14' to form a triangular multiple- micro-tip shape. Then, after an insulating layer 15 and a gate layer are formed on the substrate, a gate 16' is formed. The layer 15 in the lower part of an aperture 18 of the gate 16' is etched to form a hole 19. Next, the layer 12 is selectively etched to form multiple- micro-tips and obtain an element. At that time, the etching speed of the layer 12 is made extremely high and etching is completed within a short time, so that the tips which are multi-divided into triangular shapes is formed so as to spring up by the internal stress of tungsten.</p> |
