| 摘要 |
<p>PURPOSE: To reduce the consumption of treating liqs. and suppress the liqs. from being turbid each other by supporting a rectangular plate-like substrate standing erect by a cassette being in a usual attitude by itself with its lower side inclined to an imaginary horizon. CONSTITUTION: A substrate supporting cassette has substrate length part support members 3 disposed along the periphery of the substrate 1 and a pair of side plates 5 to mutually joint the ends of them. At lower parts thereof about two circular columnar support members 6 are disposed to contact with the lower end of each substrate and support it. When the cassette is in a usual attitude, each substrate 1 is standing erect with its lower side inclined to an imaginary horizon. When pulling it up from a treating liq. 14a, the liq. deposited to the substrate 1 moves to one side because of the inclination of the lower side and drops one by one. This reduces the consumption of the treating liq. and minimizes the amount of the liq. mixing into an adjacent treating tank.</p> |
