| 摘要 |
PURPOSE: To provide a positive photosensitive composition used in a far ultraviolet region, in which the ratio of the dissolving velocity of an exposure part and a non-exposure part to a developing solution is large. CONSTITUTION: In a positive type photosensitive composition containing a photo- acid generating agent, an insolubilized alkali soluble resin, an alkali soluble resin, a dissolving retarder, and an organic solvent, the photo-acid generating agent is a compound represented by Ar<1> -SO2 -NH-NH-SO2 -Ar<2> . In the formula, Ar<1> and Ar<2> are the same or different aromatic groups. |
