| 摘要 |
PURPOSE: To provide an aligner for simultaneously exposing a plurality of exposure targets. CONSTITUTION: An exposure device includes a rotary drum 2 with a rotary shaft being extended in a direction vertical to the application direction within the polarization surface of SR light 9. A cassette 3 is retained at the outerperiphery part of the rotary drum. In the cassette 3, a mask and an exposure target are allowed to oppose each other in the diameter direction of the rotary drum. The SR light is applied to the mask from the diameter direction of the rotary drum on exposure. In this case, the rotary drum is properly rotated. |
