PRODUCTION OF PLANE OPTICAL WAVEGUIDE

摘要

PURPOSE: To provide a novel method capable of easily producing a plane optical waveguide having diffraction gratings. CONSTITUTION: This process for production has a first stage for forming a first layer 12 added with germanium oxide by using quartz glass as a chief material on a substrate 10, a second stage for forming a core part 16 as an optical waveguide region by irradiating the prescribed region of this first layer 12 with UV light, a third stage for forming the interference fringes of the UV light by irradiating the prescribed region of the core part 16 with the UV light to form refraction gratings 26 in the core part 16 and a fourth stage for forming a second layer by using the quartz glass as a chief material on the first layer 12. The formation of the core part 16 is executed by the irradiation with the UV light in the same manner as for the formation of the diffraction gratings 26 and, therefore, the flow over the entire part of the work is simplified.