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发明名称
SILICON OXIDE FILM FORMING METHOD
摘要
申请公布号
JPH08288286(A)
申请公布日期
1996.11.01
申请号
JP19950093901
申请日期
1995.04.19
申请人
SHARP CORP
发明人
IZAWA HIDEO
分类号
C23C16/04;C23C16/40;C23C16/42;C23C16/50;H01L21/316;H01L21/336;H01L29/786;(IPC1-7):H01L21/316
主分类号
C23C16/04
代理机构
代理人
主权项
地址
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