TRANSPORT OF WAFER BY ROBOT AND APPARATUS THEREFOR

摘要

PURPOSE: To achieve highly reliable transportation of a wafer by eliminating damage to a wafer and a robot apparatus even in a case where misregistration between a transporting arm and a transport-target position or misregistration of a wafer on the transporting arm occurs. CONSTITUTION: Even in a case where misregistration between a transporting arm 3 and a transport-target position of misregistration of a wafer 1 on the transporting arm 3 occurs, damage to the wafer 1 and a robot apparatus are eliminated by temporally turning off a vacuum chuck mechanism 4 to achieve highly reliable transportation of the wafer.