METHOD AND APPARATUS FOR MEASURING VOLTAGE

摘要

PURPOSE: To accurately bring the voltage pulse which arrives at an electro- optical material into agreement with a laser pulse in a short time. CONSTITUTION: A photo-electric converter 3 converts an incident laser pulse into a voltage pulse, and an optical delay circuit 5 delays the laser pulse by a second delay amount. The voltage pulse arrives at the position where an electro-optical material 9 is placed by the application to a circuit 8 to be measured, and the laser pulse is introduced to the material 9 via a mirror 6. A waveform comparator 12 obtains the deviationΔt of the time of the response waveform of the voltage by the laser beam having a different oscillation frequency. A signal processor 11a obtains a correction amount based on the deviationΔt, and varies the second delay amount by the correction amount. Thus, the voltage pulse and the laser pulse arriving at the material 9 are generated from the same laser pulse incident to a beam splitter 2.