发明名称 METHOD AND APPARATUS FOR PICKING UP PELLET
摘要 <p>PURPOSE: To protect a pellet from damage or contamination due to adhesive when it is picked up. CONSTITUTION: An ultraviolet ray irradiation unit 12 is disposed under a table 11 for holding an adhesive sheet 3 applied with a pellet 2 horizontally. The ultraviolet ray irradiation unit 12 is shifted between a retracted position and an upper limit position for pushing up the adhesive sheet 3 and ultraviolet rays are radiated from an ultraviolet ray lamp 15 contained therein through an window 14. A collet 17 for vacuum sucking the pellet 2 stripped from the adhesive sheet 3 is disposed above the ultraviolet ray irradiation unit 12. The adhesive applied onto the adhesive sheet 3 is made of such material as curing upon irradiation with ultraviolet rays to decrease adhesion. Since the pellet can be stripped from the adhesive sheet, it can be picked up through only vacuum suction of the collet and the needle for picking up the pellet can be eliminated.</p>
申请公布号 JPH08288318(A) 申请公布日期 1996.11.01
申请号 JP19950113561 申请日期 1995.04.14
申请人 HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD 发明人 MITACHI NOBORU
分类号 H01L21/67;H01L21/52;H01L21/68;(IPC1-7):H01L21/52 主分类号 H01L21/67
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