PROCESSING UNIT

摘要

PURPOSE: To provide a processing technique which enables improvement in productivity. CONSTITUTION: In a processing chamber (body) 1, a stage (setting stage) 2 for supporting a processing target 3 is provided, and a guide plate 4 forming a predetermined flow passage 5 between the surface of the processing target 3 and the guide plate 4 is provided. A processing fluid 7 containing ozone generated by an ozone generation source is supplied from a nozzle 6a to the flow passage 5. A light source 8 for irradiating the processing target 3 with a light for exciting the processing fluid 7 via the guide plate 4 is provided near and along the surface of the guide plate 4. The nozzle 6a is opened between the processing target 3 and the guide plate 4 from the lateral side on the periphery of the processing target 3. The processing fluid 7 is guided from one peripheral portion of the processing target 3 toward the other.