| 摘要 |
PURPOSE: To prevent contamination caused by a supporting member like an O-ring at a center of a substrate without a variation in productive process. CONSTITUTION: A liquid drip apparatus is made up of a carrying mechanism and a gas spouting mechanism. In the carrying mechanism, a substrate (W) is supported on its edge part and carried by a pair of rollers 12a. The gas spouting mechanism has a pair of air knives 21 and 22 and upper and lower sides of the substrate (W). The air knives 21 and 22 have each slit-shaped spouting opening 21a or 22a at the top thereof. The upper spouting opening 21 a has a downward convex curve shape which is more projected at the center, while the lower spouting opening 22a has a downward recessed-line shape more recessed to the center. These curved lines have a curvature almost equal to that caused by deflection of the substrate (W) carried by the carrying mechanism. In this constitution, gas is spouted out uniformly all over the substrate (W). |
