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发明名称
FABRICATION OF FIELD-EFFECT TRANSISTOR
摘要
申请公布号
JPH08288308(A)
申请公布日期
1996.11.01
申请号
JP19950087189
申请日期
1995.04.12
申请人
SHARP CORP
发明人
SHIRAKAWA KAZUHIKO
分类号
H01L21/28;H01L21/338;H01L29/812;(IPC1-7):H01L21/338
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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