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发明名称
ION IMPLANTING METHOD
摘要
申请公布号
JPH08288233(A)
申请公布日期
1996.11.01
申请号
JP19950086583
申请日期
1995.04.12
申请人
MATSUSHITA ELECTRON CORP
发明人
FUSE HARUHIDE
分类号
H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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