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发明名称
ELECTRON BEAM APPARATUS WITH PLASMA CLEANING MECHANISM
摘要
申请公布号
JPH08288247(A)
申请公布日期
1996.11.01
申请号
JP19950089715
申请日期
1995.04.14
申请人
NIKON CORP
发明人
MORIYAMA TAKESHI
分类号
B08B3/10;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B3/10
代理机构
代理人
主权项
地址
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