发明名称 METHOD AND APPARATUS FOR MEASURING DEGREE OF VACUUM IN VACUUM CASE FOR INFRARED DETECTOR
摘要 <p>PURPOSE: To obtain method and apparatus for measuring the degree of vacuum in a vacuum case for infrared detector in which variation in the degree of vacuum can be measured accurately and the duration of vacuum can be measured and evaluated accurately in a short term. CONSTITUTION: The apparatus for measuring the degree of vacuum in a vacuum case 3 comprises an infrared detector 1, and a temperature measuring diode 2 outputting an electric signal corresponding to the detected temperature. The apparatus for measuring the degree of vacuum in a vacuum case 3 further comprises a cooler 10 for cooling the detector 1 with a constant power, a voltmeter 20 for detecting the voltage value of an electric signal outputted from the diode 2, a memory section 21 for storing a data indicative of the relationship between the degree of vacuum measured before sealing the vacuum case 3 and the temperature corresponding to a voltage detected by the voltmeter 20, and an arithmetic section 22 for operating the degree of vacuum based on a data stored in the memory section 21 and a temperature corresponding to a voltage detected by the voltmeter 20 after sealing the vacuum case 3.</p>
申请公布号 JPH08285716(A) 申请公布日期 1996.11.01
申请号 JP19950110007 申请日期 1995.04.11
申请人 NIKON CORP 发明人 FUSHIMI NAOFUMI;FUJII HIDEKI;KIYOTA TAIJIRO
分类号 G01L21/00;F16L59/06;G01J1/02;(IPC1-7):G01L21/00 主分类号 G01L21/00
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