THIN FILM TRANSISTOR, MANUFACTURING METHOD THEREOF AND LIQUID CRYSTAL DISPLAY SYSTEM

摘要

PURPOSE: To avoid the burning or after image due to block parting on display or the dispersion in introduced voltage while enhancing the TFT characteristics. CONSTITUTION: An insulating film 3 covering a patterned shielding film 2 is formed on a transparent substrate 1. Next, a source region 5 and a drain region 5 made of the first low resistant semiconductor layers are formed in mutually separated state to be respectively connected to a source electrode 4 and a drain electrode 4. Next, the second semiconductor layer 6 is formed extending over the source region 5 and the drain region 5 to form a gate electrode 8 on these regions 5 through the intermediary of a gate insulating film 7. In such a constitution, the first semiconductor layer is formed of the films 5 while the source.drain regions 5 and the gate electrode 8 are self-aligningly formed with the patterned shielding film 2.