| 摘要 |
PURPOSE: To adjust the optical axis of the light emitted from a light emitting element in the direction perpendicular to a reference plane with high accuracy. CONSTITUTION: The light from an LD 4 is transmitted through an ND filter 6 with PH and is made incident on a CCD camera 5. The image signal meeting the light intensity transmitted through the ND filter 6 with PH is obtd. by this CCD camera 5 and a light intensity distribution is obtd. The position of the peak intensity Pa of this light intensity distribution is aligned to the central axis 5a of the image pickup of the CCD camera 5 and thereafter, the inclination of the LD 4 is adjusted by using a biaxial goniostage 2 until the intensity distribution at each section in the x-y axis direction is made uniform. |
