FORMING METHOD OF POLYCRYSTALLINE SILICON FILM AND MANUFACTURING METHOD OF THIN FILM TRANSISTOR,申请号JP19950084373-传众专利搜索

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发明名称	FORMING METHOD OF POLYCRYSTALLINE SILICON FILM AND MANUFACTURING METHOD OF THIN FILM TRANSISTOR
摘要
申请公布号	JPH08288515(A)	申请公布日期	1996.11.01
申请号	JP19950084373	申请日期	1995.04.10
申请人	SHARP CORP	发明人	IWASAKI YASUNORI
分类号	H01L21/20;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L29/786	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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