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发明名称
METAL ORGANIC VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH08288226(A)
申请公布日期
1996.11.01
申请号
JP19950092858
申请日期
1995.04.18
申请人
FURUKAWA ELECTRIC CO LTD:THE
发明人
IKEDA MASAKIYO
分类号
C23C16/54;H01L21/205;(IPC1-7):H01L21/205
主分类号
C23C16/54
代理机构
代理人
主权项
地址
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