| 摘要 |
PURPOSE: To produce a tip for atomic force microscope having small dimensions with high accuracy and to compose the tip of substantially pure silicon. CONSTITUTION: A uniformly tapered tubular tip 10 having circumferential surface and front end part surface 13 is formed. Carbon masks 15a, 15c are formed on the tip along the circumferential surface and a carbon mask 15b is formed on the front end part surface 13. In order to remove the material from the tip and each carbon mask, the tip is etched for a predetermined time and upon elapse of a predetermined time, each mask is removed completely. Three spikes 32a, 32b, 32c directing the position, from where each mask is removed, are formed by removing the material from the tip. |
