BESCHICHTUNG DURCH THERMISCHE ZERSETZUNG ODER REAKTION CHEMI SCHER VERBINDUNGEN BEI ERHOEHTER TEMPERATUR

摘要

A process for forming a film on the surface of a substrate by a gas phase method in the presence of a catalyst used in the solid state electronics at a predetermined distance from the surface of the substrate on which the film is to be formed and a process for forming a silicon oxide or silicon nitride in the presence of a catalyst selected from the group comprising platinum and the like.