发明名称 |
MAINTAINING METHOD FOR TANK OF VACUUM EVAPORATION APPARATUS AT HIGH VACUUM |
摘要 |
PURPOSE:To maintain an evaporation tank at a high vacuum even in the case of high vacuum evaporation of a number of samples by use of ion pump in order to form thin film of excellent quality by effecting vacuum evaporation by use of a sorption pump together with ion pump when vacuum is lowered by use of ion pump alone. |
申请公布号 |
JPS5368684(A) |
申请公布日期 |
1978.06.19 |
申请号 |
JP19760145046 |
申请日期 |
1976.12.01 |
申请人 |
FUJITSU LTD |
发明人 |
MIYASHITA SHINICHI |
分类号 |
H01J41/20;C23C14/24;C23C14/56;F04B37/16 |
主分类号 |
H01J41/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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