Substrate transfer appts. for vacuum chamber

摘要

An appts. is claimed for transporting substrates (2) between first and second gripping and holding devices having one or more substrate holders located in a vacuum chamber. The first device is equipped with one or more positionable grippers (75) which can be moved into a substrate holding or releasing position by an (electro)mechanical or magnetic adjuster (130). The second device (1) is equipped with one or more positionable grippers (75) which can be moved into a substrate-holding position, against the action of a set pressure or a spring, and into a substrate-release position against the action of a membrane, exposed to a pneumatic pressure (Pa) and/or vacuum pressure (Pv), and a cooperating adjuster. In the substrate transfer position of the two devices, the two substrate accommodating portions can be aligned and fixed coaxially to one another.