Method and apparatus for minimizing degradation of equipment in a laser cleaning technique

摘要

A method and apparatus for cleaning equipment surfaces using a laser. A barrier layer is provided at a surface to be cleaned prior to being impinged by light from a laser in order to avoid degradation in the form of oxidation of the surface. The laser light causes residual material on the surface to be removed while the barrier layer ensures that energy from the laser light is evenly distributed. In addition, the barrier layer shields the surface from oxygen to thereby prevent oxidation of the surface.