| 摘要 |
System for and a method of fixing chlorofluorocarbons or other halogenated hydrocarbons, for example, CHF3 or CCl2F2 recirculated and collected or discharged from a dry etching apparatus, so as to make the chlorofluorocarbon or halogenated hydrocarbon harmless against the earth's ozone layer. A gaseous hydrocarbon like ethane, ethylene or acetylene gas is mixed with a chlorofluorocarbon or other halogenated hydrocarbon gas in a reaction tube 61. The mixed gas is then excited to a plasma state for plasma copolymerization. A solid copolymer of the halogenated hydrocarbon and the hydrocarbon generated by the plasma copolymerization is deposited and accumulated onto the inner wall of the reaction tube 61 or on a fixation member 14.
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