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发明名称
FORMATION OF HIGH MELTING POINT METAL SILICIDE FILM
摘要
申请公布号
JPH08283944(A)
申请公布日期
1996.10.29
申请号
JP19950088039
申请日期
1995.04.13
申请人
MITSUBISHI ELECTRIC CORP
发明人
MORI KENICHI
分类号
C23C16/02;C23C16/42;H01L21/28;H01L21/285;H01L21/3205;H01L23/52;(IPC1-7):C23C16/02;H01L21/320
主分类号
C23C16/02
代理机构
代理人
主权项
地址
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