发明名称 |
Split-field pupil plane determination apparatus |
摘要 |
A split-field pupil plane determination apparatus (10) having a wedge assembly (16) with a first glass wedge (18) and a second glass wedge (20) positioned to divide a laser beam (12) into a first laser beam half (22) and a second laser beam half (24) which diverge away from the wedge assembly (16). A wire mask (26) is positioned immediately after the wedge assembly (16) in the path of the laser beam halves (22, 24) such that a shadow thereof is cast as a first shadow half (30) and a second shadow half (32) at the input to a relay telescope (14). The relay telescope (14) causes the laser beam halves (22, 24) to converge such that the first shadow half (30) of the wire mask (26) is aligned with the second shadow half (32) at any subsequent pupil plane (34).
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申请公布号 |
US5570189(A) |
申请公布日期 |
1996.10.29 |
申请号 |
US19950453404 |
申请日期 |
1995.05.30 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE UNITED STATES DEPARTMENT OF ENERGY |
发明人 |
SALMON, JOSEPH T. |
分类号 |
G02B7/00;G02B27/12;G02B27/32;(IPC1-7):G01B11/26 |
主分类号 |
G02B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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