发明名称 |
Method for fabrication of microchannel electron multipliers |
摘要 |
The present invention discloses a method for constructing a completely micromachined MCP that is activated with thin-film dynodes wherein the interchannel regions are first dry etched in the substrate, resulting in channel pillars. The etched portions of the substrate are then back filled and the channel pillars are thereafter removed to produce a micromachined perforated microchannel plate. The technique may be employed to produce an active element for an integrated image tube or photomultiplier tube.
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申请公布号 |
US5569355(A) |
申请公布日期 |
1996.10.29 |
申请号 |
US19950371548 |
申请日期 |
1995.01.11 |
申请人 |
CENTER FOR ADVANCED FIBEROPTIC APPLICATIONS |
发明人 |
THEN, ALAN M.;SHANK, STEVEN M.;SOAVE, ROBERT J.;TASKER, G. WILLIAM |
分类号 |
H01J9/12;(IPC1-7):H01L21/00;B44C1/22 |
主分类号 |
H01J9/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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