发明名称 |
Method of manufacturing a frame-mounted membrane |
摘要 |
In a method of manufacturing frame-mounted membranes, a first membrane layer is formed on a substrate and openings are formed in this membrane layer which are then covered by a second membrane layer, a frame structure is formed on the membrane layers around the openings and the membrane layers with the frame structure are separated from the substrate to provide the frame-mounted membranes.
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申请公布号 |
US5569855(A) |
申请公布日期 |
1996.10.29 |
申请号 |
US19950492833 |
申请日期 |
1995.06.19 |
申请人 |
FORSCHUNGSZENTRUM KARLSRUHE GMBH |
发明人 |
SCHOMBURG, WERNER;RAPP, RICHARD;KADEL, KLAUS |
分类号 |
F04B43/04;G01L7/08;G01L9/00;G03F7/00;(IPC1-7):G01L7/00 |
主分类号 |
F04B43/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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