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发明名称
摘要
申请公布号
JPS5320349(B2)
申请公布日期
1978.06.26
申请号
JP19730035222
申请日期
1973.03.27
申请人
发明人
分类号
C30B19/00;C30B29/40;H01L21/208;H01L33/30
主分类号
C30B19/00
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代理人
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