| 摘要 |
A thin film actuated mirror for an actuated mirror array includes a pedestal (14), a piezoelectric structure (12) mounted to the pedestal (14), and a mirror surface (32) interconnected to the piezoelectric structure (12) such that the mirror surface (32) tilts in response to the deformation of the piezoelectric material layer (18). The pedestal (14) includes a first pedestal section (38) and a second pedestal section (40), and the piezoelectric structure (12) is divided into a first portion (42) and a second portion (44). The piezoelectric structure (12) includes a piezoelectric material layer (18) having two opposing surfaces, and two metal electrodes, the electrodes being mounted on opposing surfaces of the piezoelectric material. The piezoelectric structure first portion (42) is mounted to the first pedestal section (38) at a proximal end (28) of the piezoelectric structure (12) and the second portion (44) is mounted to the second pedestal section (40) at a distal end (30) of the piezoelectric structure (12).
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