METHOD & DEVICE FOR A FORMATION OF A GRANULAR THIN FILM USING A VACUUM THERMAL EVAPORATION AND SPUTTERING

摘要

This invention relates to the method for forming fine granula thin film using vacuum heat deposition, describes the method comprising the steps of forming a first material by vacuum heat deposition wherein the pressure in the reacting chamber remains a first pressure not forming plasma for sputtering; and spreading a second material with granular shape in the first material by sputtering method wherein the pressure in the reacting chamber remains a second pressure forming plasma for sputtering.