PROCEDE ET APPAREIL DE PREPARATION DE FILMS D'OXYDE DE FER POURLA FABRICATION DE MASQUES PHOTOSENSIBLES
摘要
<p>A technique for the preparation of iron oxide films designed for use as photomasks for thin film and semiconductor processing involves sputtering iron in a carbon monoxide ambient containing carbon dioxide upon a substrate member.</p>
申请公布号
BE777203(A1)
申请公布日期
1972.04.17
申请号
BE19710777203
申请日期
1971.12.23
申请人
WESTERN ELECTRIC CY INC., 195, BROADWAY, NEW YORK, N.Y. (E.U.A.),
