发明名称 Industrial scale appts. implants tin ions into steel to reduce friction of alloy
摘要 Ion implantation used in this appts. improves strength and/or reduces surface friction of the steel alloy. Ions are produced in novel manner, pref. by 0.05 ms gas laser pulses with PRF up to 1kHz. They are extracted by electron optics at very high beam current, but lesser brilliance, i.e. not sharply focused, to enter the acceleration section. Ions differ chemically from the target by at least four periodic table groups. The target, iron or steel alloy, is implanted by tin. Pref. the beam is inclined more than 10 deg from the surface normal; its energy being 10-10,000 keV. Heat treatment is applied at 10 deg C below the m.pt. for at least one mu s, using laser pulses or particle beams over at least 10 femtoseconds; temperatures above the m.pt. arise briefly. Several chemically different ions may be implanted. The ion source is the tip of a rod, fed into the laser beam focus.
申请公布号 DE19513566(A1) 申请公布日期 1996.10.24
申请号 DE19951013566 申请日期 1995.04.18
申请人 HORA, HEINRICH, PROF. DR. DR., 85586 POING, DE 发明人 HOEPFL, REINHARD, PROF. DR., 93489 SCHORNDORF, DE;HORA, HEINRICH, PROF. DR.DR., 85586 POING, DE;KELLY, JAK C., PROF. DR., CHATSWOOD, AU
分类号 C23C14/48;H01J27/24;H01J37/317;(IPC1-7):C23C14/48 主分类号 C23C14/48
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