Halbleiter-Messaufnehmer zur Messung einer physikalischen Grösse

摘要

A semiconductor acceleration sensor has an inner weight member (22b) supported by a supporting member (22a) through a pair of first torsion bars (22d) and an outer weight member (22c) supported by the inner weight member through a pair of second torsion bars (22e). The components of the force being sensed are thus converted into twisting displacements for sensing. The displacements may be converted into variations of capacitances of two respective pairs of capacitors (C1 to C4) on the axes of the torsion bars. Alternatively, the displacements may be converted into electrical signals by piezo resistance elements (43a - 43d; Fig. 11) formed in the torsion bars (42d, 42e).