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发明名称
PRODUCTION OF HALOSILANE
摘要
申请公布号
JPH08277104(A)
申请公布日期
1996.10.22
申请号
JP19950104666
申请日期
1995.04.05
申请人
SHIN ETSU CHEM CO LTD
发明人
KIOKA KAZUMASA;NAKAGAWA NOBUHIRO;SHIMIZU MUTSUO
分类号
C01B33/107;(IPC1-7):C01B33/107
主分类号
C01B33/107
代理机构
代理人
主权项
地址
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