Method and device for measuring distortion of a transmitting beam or a surface shape of a three-dimensional object

摘要

A method of measuring a distortion of a transmitting beam, characterized in that a transmitting beam is emitted from a beam generator and projected onto a screen as a bright spot, the bright spot is scanned over a surface of the screen, and a distortion of the transmitting beam is measured on the basis of a distance between a first location of the bright spot on the screen at a first time when the transmitting beam is incident on a beam receiving device in a specified incident direction upon transmitting through a measured body, and a second location of the bright spot on the screen at a second time when the transmitting beam is incident on the beam receiving device in the specified incident direction upon not transmitting through the measured body. A surface shape of a three-dimensional object may also be measured on the basis of a distance between a first location of the bright spot on the screen at a first time when the transmitting beam is incident on a beam receiving device in a specified incident direction upon being reflected from a surface of a three-dimensional measured body, and a second location of the bright spot on the screen at a second time when the transmitting beam is incident on the beam receiving device in the specified incident direction upon being reflected from a surface of a reference body. The present invention provides measurements having improved accuracy for objects of any size irrespective of the resolution of the beam receiving device.