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发明名称
SUSCEPTOR FOR VAPOR PHASE GROWTH APPARATUS
摘要
申请公布号
JPH08277193(A)
申请公布日期
1996.10.22
申请号
JP19950100774
申请日期
1995.03.31
申请人
SUMITOMO SITIX CORP
发明人
NISHIHATA HIDEKI
分类号
C30B25/12;C23C16/44;C23C16/458;H01L21/205;(IPC1-7):C30B25/12
主分类号
C30B25/12
代理机构
代理人
主权项
地址
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